Samsung electronics co., ltd. (20250107070). SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE
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SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250107070 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device may include a first bit line that extends in a first direction, a first active pillar and a second active pillar on the first bit line, a first gate insulating pattern enclosing the first active pillar, a second gate insulating pattern on the second active pillar, a first word line and a second word line that extends in a second direction that intersects the first direction, and a protection pattern between the first and second word lines. an air gap is between the first and second word lines and may be adjacent to the protection pattern.