Samsung electronics co., ltd. (20250098278). SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE
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SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250098278 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device includes a substrate, lower channel layers spaced apart from each other in a vertical direction perpendicular to an upper surface of the substrate and extending in the first direction, upper channel layers on the lower channel layers, respectively, and spaced apart from each other in the vertical direction, a middle dielectric isolation structure between an uppermost lower channel layer among the lower channel layers and a lowermost upper channel layer among the upper channel layers, a lower gate structure on the lower channel layers; an upper gate structure on the upper channel layers on the lower gate structure and extending in a second direction perpendicular to the first direction. a gate isolation insulating layer between the lower gate structure and the upper gate structure, in contact with a side surface of the middle dielectric isolation structure, and extending around the lower gate structure.