Samsung electronics co., ltd. (20250098224). SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Yonghee Park of Hwaseong-si KR
Munhyeon Kim of Hwaseong-si KR
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250098224 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device includes active regions extending on a substrate in a first direction, gate structures intersecting the active regions and extending on the substrate in a second direction, source/drain regions in recess regions in which the active regions are recessed, on both sides of each of the gate structures, and contact plugs connected to the source/drain regions, wherein each of the source/drain regions include first and second epitaxial layers sequentially stacked on the active regions in the recess regions in a third direction perpendicular to an upper surface of the substrate, respectively, and wherein ratios of the first epitaxial layer thickness in the third direction to the second epitaxial layer thickness in the third direction are different in different ones of the source/drain regions.