Samsung electronics co., ltd. (20250098170). SEMICONDUCTOR DEVICES AND ELECTRONIC SYSTEMS INCLUDING THE SAME
SEMICONDUCTOR DEVICES AND ELECTRONIC SYSTEMS INCLUDING THE SAME
Organization Name
Inventor(s)
Kyeong Jin Park of Yongin-si KR
SEMICONDUCTOR DEVICES AND ELECTRONIC SYSTEMS INCLUDING THE SAME
This abstract first appeared for US patent application 20250098170 titled 'SEMICONDUCTOR DEVICES AND ELECTRONIC SYSTEMS INCLUDING THE SAME
Original Abstract Submitted
a method of fabricating a semiconductor device is provided. the method includes: forming a mold structure, in which sacrificial layers and insulating layers are alternately stacked, on a substrate; forming trenches to penetrate the mold structure; forming first sacrificial patterns in the trenches; forming a first supporting layer on the mold structure and the first sacrificial patterns; forming vertical structures to penetrate the first supporting layer and the mold structure; forming a second supporting layer on the first supporting layer and on the vertical structures; forming openings to penetrate the first and second supporting layers and to expose the first sacrificial patterns; removing the first sacrificial patterns through the openings; and replacing the sacrificial layers with electrodes.