Samsung electronics co., ltd. (20250098155). SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE
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SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250098155 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device includes lower electrodes on a substrate, a support pattern between the lower electrodes, an upper electrode on the lower electrodes and the support pattern, and a dielectric layer between the lower electrodes and the upper electrode, and between the support pattern and the upper electrode. the upper electrode includes a first portion on upper surfaces of the lower electrodes and a second portion on a sidewall of the support pattern. the first portion is thicker than the second portion.