Samsung electronics co., ltd. (20250081599). SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Dong Hoon Hwang of Suwon-si (KR)
Byung Ho Moon of Suwon-si (KR)
Kyoung-MI Park of Suwon-si (KR)
Kyung Hee Cho of Suwon-si (KR)
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250081599 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device that includes a lower pattern extending in a first direction, a first channel pattern on the lower pattern, and includes a plurality of first sheet patterns, a second channel pattern on the lower pattern, includes a plurality of second sheet patterns and spaced apart from the first channel pattern, a first gate structure which extends around the first sheet pattern, and includes a first gate electrode and a first gate insulating film, a second gate structure which extends around the second sheet pattern, and includes a second gate electrode and a second gate insulating film, a first gate capping pattern and a second gate capping pattern. the number of first sheet patterns is different from the number of second sheet patterns, and a thickness of the first gate capping pattern is different from a thickness of the second gate capping pattern.