Samsung electronics co., ltd. (20250079129). LINER STRUCTURE
LINER STRUCTURE
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LINER STRUCTURE
This abstract first appeared for US patent application 20250079129 titled 'LINER STRUCTURE
Original Abstract Submitted
a liner structure may include a liner and a first block. the liner may be configured to be arranged on an inner sidewall of a reaction chamber configured to receive a heater and a substrate. the first block may be connected to the liner. the first block may include a material different from a material of the liner.