Samsung electronics co., ltd. (20250076360). SUBSTRATE INSPECTION APPARATUS

SUBSTRATE INSPECTION APPARATUS

Organization Name

samsung electronics co., ltd.

Inventor(s)

Daesung Jung of Suwon-si (KR)

Seongbeom Lee of Suwon-si (KR)

Gyouil Jeong of Suwon-si (KR)

Sangyoon Han of Suwon-si (KR)

Myungjoon Kim of Suwon-si (KR)

Kyuhwang Won of Suwon-si (KR)

Jaein Jeong of Suwon-si (KR)

Hoomi Choi of Suwon-si (KR)

SUBSTRATE INSPECTION APPARATUS

This abstract first appeared for US patent application 20250076360 titled 'SUBSTRATE INSPECTION APPARATUS

Original Abstract Submitted

a substrate inspection apparatus includes a substrate support portion that fixedly holds a semiconductor substrate such that an upper surface and a lower surface of the semiconductor substrate are exposed; an upper inspection portion including an upper probe having a first end portion spaced apart from the upper surface, and an upper charge sensor in the first end portion that obtains an upper surface charge sensing value from the upper surface; and a lower inspection portion including a lower probe having a second end portion spaced apart from the lower surface, and a lower charge sensor in the second end portion that obtains a lower surface charge sensing value from the lower surface.