Samsung electronics co., ltd. (20250022980). CHEMICAL LIFT OFF DEVICE AND METHOD THEREOF
CHEMICAL LIFT OFF DEVICE AND METHOD THEREOF
Organization Name
Inventor(s)
Kyungwook Hwang of Suwon-si KR
CHEMICAL LIFT OFF DEVICE AND METHOD THEREOF
This abstract first appeared for US patent application 20250022980 titled 'CHEMICAL LIFT OFF DEVICE AND METHOD THEREOF
Original Abstract Submitted
a chemical lift-off device includes a first chamber including a first bath containing a first chemical solution and configured to receive a semiconductor light-emitting device on a substrate, such that the semiconductor light-emitting device is partially separated from the substrate by being submerged in the first chemical solution, a cleaning bath containing deionized water and configured to receive the semiconductor light-emitting device that is partially separated from the substrate, and a second chamber including a separator including a chemical solution sprayer configured to spray a second chemical solution toward the semiconductor light-emitting device that is partially separated from the substrate, such that the semiconductor light-emitting device is completely separated from the substrate by being sprayed with the second chemical solution and a recovery assembly provided at a lower portion of the separator and configured to recover the semiconductor light-emitting device that is completely separated from the substrate.