Samsung electronics co., ltd. (20250016994). SEMICONDUCTOR DEVICE
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SEMICONDUCTOR DEVICE
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SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250016994 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
the semiconductor includes a substrate including first active patterns, the substrate defining trenches between the first active patterns; an upper silicon pattern on an upper sidewall of at least a portion of each of the first active patterns; and a first contact plug contacting an edge portion in a longitudinal direction of each of the first active patterns, a sidewall of the first contact plug contacting at least a portion of the upper silicon pattern, and the first contact plug having a bottom lower than a bottom of the upper silicon pattern.