Samsung electronics co., ltd. (20250015114). IMAGE SENSOR AND MANUFACTURING METHOD OF IMAGE SENSOR
IMAGE SENSOR AND MANUFACTURING METHOD OF IMAGE SENSOR
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IMAGE SENSOR AND MANUFACTURING METHOD OF IMAGE SENSOR
This abstract first appeared for US patent application 20250015114 titled 'IMAGE SENSOR AND MANUFACTURING METHOD OF IMAGE SENSOR
Original Abstract Submitted
an image sensor according to an embodiment includes a substrate having first and second surfaces facing each other, separated by a deep trench, and including a plurality of pixel regions; a plurality of photoelectric conversion regions disposed in the plurality of pixel regions; a blocking region disposed in the plurality of pixel regions; and a plurality of color filters and a plurality of micro lenses disposed on the second surface of the substrate. the blocking region is disposed adjacent to the second surface of the substrate, the blocking region includes a first element of a first type, and the plurality of photoelectric conversion regions include a second element of a second type different from the first type. the concentration of the first element on the second surface of the substrate in the blocking region is about 1e16/cmto about 1e18/cm.