Samsung electronics co., ltd. (20240429267). CAPACITOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
CAPACITOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
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CAPACITOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
This abstract first appeared for US patent application 20240429267 titled 'CAPACITOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
Original Abstract Submitted
a capacitor includes a first electrode including a conductive layer, a second electrode spaced apart from the first electrode, a dielectric layer disposed between the first electrode and the second electrode, and an interfacial layer disposed between the first electrode and the dielectric layer, wherein the conductive layer includes a first element, a second element, and a third element, the first element includes ti or al, the second element includes ti, al, hf, zr, ta, cr, y, sc, si, nb, mo, v, w, mn, ni, or co, the third element includes n, the first element and the second element are different from each other, and the conductive layer has a rock salt crystal structure.