Samsung electronics co., ltd. (20240421206). SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Sanghoon Ahn of Suwon-si, (KR)
Minkyoung Lee of Suwon-si, (KR)
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20240421206 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device includes an active pattern extending on a substrate in a first direction; first and second lower channel layers in a first region and a second region of the active pattern, respectively; first and second upper channel layers on the first and second lower channel layers, respectively; a first source/drain pattern connected to the first and second lower channel layers; an isolation insulating layer on surfaces of the first source/drain pattern in the second direction, where a thickness of opposing edge portions of the isolation insulating layer when viewed in cross section along the first direction is smaller than a thickness of a central portion therebetween; a second source/drain pattern connected to the first and second upper channel layers; and an interlayer insulating layer on the second source/drain patterns and on the isolation insulating layer.
