Samsung electronics co., ltd. (20240418645). SEMICONDUCTOR MEASUREMENT APPARATUS
SEMICONDUCTOR MEASUREMENT APPARATUS
Organization Name
Inventor(s)
Jangwoon Sung of Suwon-si (KR)
Seungbeom Park of Suwon-si (KR)
SEMICONDUCTOR MEASUREMENT APPARATUS
This abstract first appeared for US patent application 20240418645 titled 'SEMICONDUCTOR MEASUREMENT APPARATUS
Original Abstract Submitted
an example semiconductor measurement apparatus includes a light source, a pattern generator, a stage, an image sensor, and a controller. the light source is configured to output light in a predetermined wavelength band. the pattern generator is configured to generate light including a speckle pattern by scattering the light output from the light source. the stage is disposed on a movement path of the light including the speckle pattern, and a sample reflecting the light including the speckle pattern is seated on the stage. the image sensor is configured to receive light reflected from the sample and generate an original image representing a diffractive pattern of light reflected from the sample. the controller is configured to generate a prediction image for estimating diffractive characteristics of light incident on the image sensor.
