Samsung electronics co., ltd. (20240412407). SEMICONDUCTOR MANUFACTURING DEVICE AND CONTROL OF THE SAME
SEMICONDUCTOR MANUFACTURING DEVICE AND CONTROL OF THE SAME
Organization Name
Inventor(s)
Jonghyeok Park of Suwon-si (KR)
SEMICONDUCTOR MANUFACTURING DEVICE AND CONTROL OF THE SAME
This abstract first appeared for US patent application 20240412407 titled 'SEMICONDUCTOR MANUFACTURING DEVICE AND CONTROL OF THE SAME
Original Abstract Submitted
a semiconductor manufacturing device includes an electron beam source emitting; a plurality of condenser lenses disposed between a stage on which an object including structures is seated and the electron beam source; an objective lens disposed between the plurality of condenser lenses and the stage; an aperture disposed between the plurality of condenser lenses; and a controller configured to acquire a plurality of original images according to a working distance between the objective lens and the object, acquire a pattern image indicating the structures from the plurality of original images, a plurality of kernel images indicating distribution of an electron beam on the object, and a plurality of position vectors indicating a relative position of the structures in the plurality of kernel images, and adjust a position of the aperture based on a motion vector indicating movement of the plurality of position vectors according to the working distance.
