Samsung electronics co., ltd. (20240405090). SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Seong Heum Choi of Suwon-si (KR)
Jeong Hoon Seo of Suwon-si (KR)
Chung Hwan Shin of Suwon-si (KR)
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20240405090 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device is provided. the semiconductor device includes: a semiconductor device including: an active pattern extending in a first direction; a gate structure including a gate electrode extending in a second direction and a gate spacer on the active pattern, wherein the gate electrode and the gate spacer are spaced apart from each other in the first direction; a source/drain pattern on the active pattern; a contact barrier layer on the source/drain pattern; and a contact filling layer on the contact barrier layer. an uppermost point of the contact barrier layer is between an upper surface of the contact filling layer and a lower surface of the contact filling layer, and outer walls of the contact barrier layer and outer walls of the contact filling layer extend along a common plane.