Samsung electronics co., ltd. (20240399538). PAD CONDITIONERS simplified abstract
PAD CONDITIONERS
Organization Name
Inventor(s)
Sung Yong Park of Suwon-si (KR)
Junyoung Choi of Suwon-si (KR)
PAD CONDITIONERS
This abstract first appeared for US patent application 20240399538 titled 'PAD CONDITIONERS
Original Abstract Submitted
a pad conditioner comprising: a disk holder that is rotatable; a frame on the disk holder; a lifting and lowering support member that is between the frame and the disk holder; a posture adjusting member that is between the lifting and lowering support member and the frame and has a thickness, wherein the posture adjusting member is capable of varying the thickness; a posture sensor that is configured to detect a height of the lifting and lowering support member; and a controller that is configured to vary the thickness of the posture adjusting member according to a signal received from the posture sensor.
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