Samsung electronics co., ltd. (20240258419). POWER DEVICE AND METHOD OF MANUFACTURING THE SAME
POWER DEVICE AND METHOD OF MANUFACTURING THE SAME
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POWER DEVICE AND METHOD OF MANUFACTURING THE SAME
This abstract first appeared for US patent application 20240258419 titled 'POWER DEVICE AND METHOD OF MANUFACTURING THE SAME
Original Abstract Submitted
provided are a power device and a method of manufacturing the same. the power device may include a channel layer; a source and a drain at respective sides of the channel layer; a gate on the channel layer between the source and the drain; a passivation layer covering the source, the drain, and the gate; and a plurality of field plates in the passivation layer. the plurality of field plates may have different thicknesses. the plurality of field plates may have different widths, different pattern shapes, or both different widths and different pattern shapes.