Samsung electronics co., ltd. (20240258354). IMAGE SENSOR AND ELECTRONIC SYSTEM INCLUDING THE SAME
IMAGE SENSOR AND ELECTRONIC SYSTEM INCLUDING THE SAME
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IMAGE SENSOR AND ELECTRONIC SYSTEM INCLUDING THE SAME
This abstract first appeared for US patent application 20240258354 titled 'IMAGE SENSOR AND ELECTRONIC SYSTEM INCLUDING THE SAME
Original Abstract Submitted
an image sensor includes a lower insulating film arranged over a substrate and having a non-flat surface that has a concave-convex shape and includes a first surface, which extends in a horizontal direction parallel to a frontside surface of the substrate, and at least one second surface extending from the first surface toward the substrate, a capacitor arranged on the lower insulating film to contact the non-flat surface of the lower insulating film and conformally covering the non-flat surface of the lower insulating film along the contour of the non-flat surface of the lower insulating film, an upper insulating film covering the capacitor and the lower insulating film, and at least one air gap having a side facing the at least one second surface of the lower insulating film in the horizontal direction and having a height defined by the upper insulating film in a vertical direction.