IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME

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IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME

This abstract first appeared for US patent application 20240258346 titled 'IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME

Original Abstract Submitted

an image sensor includes: a substrate; a plurality of photodiodes disposed in the substrate; an element isolation film disposed between the plurality of photodiodes; an anti-reflection layer disposed on the plurality of photodiodes and the element isolation film; a plurality of color filters disposed on the anti-reflection layer; a fence pattern disposed between the plurality of color filters and in the anti-reflection layer; and micro lenses disposed on the plurality of color filters, wherein the fence pattern includes a first layer and a second layer that is disposed on the first layer and that includes a material different from that of the first layer, the first layer is disposed in the anti-reflection layer, and the second layer includes a first part and a second part, wherein the first part is disposed in the plurality of color filters, and wherein the second part is disposed in the anti-reflection layer.