Samsung electronics co., ltd. (20240255845). PHOTORESIST COMPOSITION

PHOTORESIST COMPOSITION

Organization Name

samsung electronics co., ltd.

Inventor(s)

Seungyeol Baek of Suwon-si KR

Chawon Koh of Suwon-si KR

Jiyoung Park of Suwon-si KR

Tsunehiro Nishi of Suwon-si KR

Wonjoon Son of Suwon-si KR

PHOTORESIST COMPOSITION

This abstract first appeared for US patent application 20240255845 titled 'PHOTORESIST COMPOSITION

Original Abstract Submitted

a photoresist composition includes an organometallic compound represented by formula 1.