Samsung electronics co., ltd. (20240255439). DEFECT DETECTION DEVICE AND DEFECT DETECTION METHOD
DEFECT DETECTION DEVICE AND DEFECT DETECTION METHOD
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DEFECT DETECTION DEVICE AND DEFECT DETECTION METHOD
This abstract first appeared for US patent application 20240255439 titled 'DEFECT DETECTION DEVICE AND DEFECT DETECTION METHOD
Original Abstract Submitted
a defect detection method includes radiating light onto a substrate, obtaining a spectrum image, performing an electrical die sorting (eds) test on the substrate, inspecting defects of each of a plurality of blocks of the substrate based on a result of the eds test, generating a defect map, generating spectrum image information by matching the spectrum image with the defect map, training a defect detection model by using the defect grade as an output value and the spectrum image information as an input value, obtaining a target spectrum image with respect to a target substrate, extracting a feature vector from the target spectrum image by using the defect detection model, and detecting a target defect grade of the target spectrum image based on the feature vector, and generating a target defect map based on the target defect grade.