Samsung electronics co., ltd. (20240254623). VAPOR SUPPLY APPARATUS
VAPOR SUPPLY APPARATUS
Organization Name
Inventor(s)
Takafumi Noguchi of Yokohama-shi JP
Toshihiro Iizuka of Yokohama-shi JP
Kenichi Nagayama of Yokohama-shi JP
VAPOR SUPPLY APPARATUS
This abstract first appeared for US patent application 20240254623 titled 'VAPOR SUPPLY APPARATUS
Original Abstract Submitted
a vapor supply apparatus is described. the apparatus stably supplies vapor to a process chamber when the vapor pressure of the material is lower than the process pressure. the apparatus includes a supply container accommodating a solid or a liquid having a vapor pressure which is lower than the process pressure. the vapor may be generated in the supply container from a liquid or from a solid. a buffer tank is interposed between the supply container and the process chamber and into which the vapor from the container is introduced by reducing pressure. the apparatus includes a mechanism for pressurizing the buffer tank and pressure-feeding the vapor to the process chamber.