Samsung display co., ltd. (20250093769). MASK QUALITY MANAGEMENT SYSTEM
MASK QUALITY MANAGEMENT SYSTEM
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MASK QUALITY MANAGEMENT SYSTEM
This abstract first appeared for US patent application 20250093769 titled 'MASK QUALITY MANAGEMENT SYSTEM
Original Abstract Submitted
a mask quality management system includes a mask including a mask frame and a plurality of mask sheets, wherein the mask sheets are fixed to an upper surface of the mask frame and disposed to be spaced apart from each other, a stage on which the mask is seated, and a first module disposed on the stage and measuring a sagging degree of the mask sheet from the mask frame by irradiating an intense light to the mask.