Samsung display co., ltd. (20250011921). DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
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DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
This abstract first appeared for US patent application 20250011921 titled 'DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
Original Abstract Submitted
a device for manufacturing a display apparatus includes a chamber including a first zone, a second zone, and a third zone arranged along a linear path, an inorganic film deposition mask disposed in the first zone, an organic film deposition mask disposed in the second zone, a deposition unit disposed in the third zone, and a susceptor which reciprocates between the first zone, the second zone, and the third zone.