Samsung display co., ltd. (20240258088). SPUTTERING APPARATUS
SPUTTERING APPARATUS
Organization Name
Inventor(s)
NAM-JIN Hyung of Cheonan-si KR
SPUTTERING APPARATUS
This abstract first appeared for US patent application 20240258088 titled 'SPUTTERING APPARATUS
Original Abstract Submitted
a sputtering apparatus includes a back plate supporting a sputtering target, a magnet module disposed under the back plate and including a magnet unit reciprocating in a first direction, a first shielding member attached on a portion of the magnet unit, moving together with the magnet unit, and covering at least a portion of the magnet unit, a protective sheet disposed between the back plate and the magnet module, and a second shielding member disposed between the back plate and the magnet module, and having a fixed position.