Samsung display co., ltd. (20240255437). INSPECTION APPARATUS
INSPECTION APPARATUS
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INSPECTION APPARATUS
This abstract first appeared for US patent application 20240255437 titled 'INSPECTION APPARATUS
Original Abstract Submitted
an inspection apparatus includes a light source which radiates a beam, a first lens disposed between the inspection object and the light source with a first opening defined therethrough in a first direction, a second lens disposed between the inspection object and the first lens with a second opening defined therethrough in the first direction to overlap the first opening, an inspection unit disposed to be spaced apart from the inspection object with the first lens interposed therebetween and including an incidence portion disposed to overlap the first opening and the second opening on a plane, and a driving unit which adjusts a distance between the first lens and the inspection object or a distance between the second lens and the inspection object.