Robert bosch gmbh (20240425356). MICROMECHANICAL DEVICE WITH A MECHANICAL STOP
MICROMECHANICAL DEVICE WITH A MECHANICAL STOP
Organization Name
Inventor(s)
Jochen Reinmuth of Reutlingen (DE)
Ralf Boessendoerfer of Dinkelsbuehl (DE)
Robert Maul of Reutlingen (DE)
MICROMECHANICAL DEVICE WITH A MECHANICAL STOP
This abstract first appeared for US patent application 20240425356 titled 'MICROMECHANICAL DEVICE WITH A MECHANICAL STOP
Original Abstract Submitted
a micromechanical device having a substrate with a main extension plane, a thin first functional layer over the substrate, and a thick second functional layer over the first functional layer. a fixed functional element and a movable functional element are formed in the second functional layer, the movable functional element is able to deflect in a first direction parallel to the main extension plane. the micromechanical device has a fixed stop element in the first functional layer, the movable functional element is also formed in the first functional layer and has a movable stop element there. the movable stop element can be applied to the fixed stop element when the movable functional element is deflected in the first direction.