Panasonic intellectual property management co., ltd. (20250091860). COMPOUND SENSOR AND MANUFACTURING METHOD
COMPOUND SENSOR AND MANUFACTURING METHOD
Organization Name
panasonic intellectual property management co., ltd.
Inventor(s)
Natsuki Miyashita of Ishikawa JP
COMPOUND SENSOR AND MANUFACTURING METHOD
This abstract first appeared for US patent application 20250091860 titled 'COMPOUND SENSOR AND MANUFACTURING METHOD
Original Abstract Submitted
a compound sensor includes a package, a first acceleration detector, a second acceleration detector, and an angular velocity detector. the first acceleration detector is disposed in a first cavity. the second acceleration detector is disposed in a second cavity. the angular velocity detector is disposed in a third cavity. an inner pressure of the first cavity is higher than an inner pressure of the second cavity. an inner pressure of the third cavity is lower than the inner pressure of the second cavity.
