ACOUSTIC WAVE DEVICE

Organization Name

murata manufacturing co., ltd.

Inventor(s)

Toru Yamaji of Nagaokakyo-shi JP

Sunao Yamazaki of Nagaokakyo-shi JP

Hiroya Suzuki of Nagaokakyo-shi JP

ACOUSTIC WAVE DEVICE

This abstract first appeared for US patent application 20250112612 titled 'ACOUSTIC WAVE DEVICE

Original Abstract Submitted

an acoustic wave device includes a piezoelectric layer, at least one pair of electrodes, and a protective film. the piezoelectric layer includes first and second major surfaces opposing each other in a first direction. the at least one pair of electrodes are on at least one of the first and second major surfaces. the protective film covers at least a portion of the pair of electrodes. the protective film includes a first-component insulative film including a first component and in contact with the pair of electrodes, and a second-component insulative film including a second component and located at the surface layer of the protective film. the first-component insulative film has a higher moisture resistance than the second-component insulative film. the second-component insulative film has a higher plasma resistance than the first-component insulative film.