Murata manufacturing co., ltd. (20250105817). ACOUSTIC WAVE DEVICE
ACOUSTIC WAVE DEVICE
Organization Name
murata manufacturing co., ltd.
Inventor(s)
Hideki Iwamoto of Nagaokakyo-shi JP
ACOUSTIC WAVE DEVICE
This abstract first appeared for US patent application 20250105817 titled 'ACOUSTIC WAVE DEVICE
Original Abstract Submitted
an acoustic wave device includes a support substrate a silicon oxide layer on the support substrate, a lithium niobate layer on the silicon oxide layer, and an idt electrode on the lithium niobate layer. when a wavelength of the idt electrode is denoted as �, a thickness of the silicon oxide layer is more than or equal to about 0�. values of t, �, duty, lncut, t, and tare within ranges that enable bw derived from formula 1 to be about 12% or less and ksaw2 derived from formula 2 to be about 0.1% or less.