SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC DEVICE

Organization Name

murata manufacturing co., ltd.

Inventor(s)

Ventsislav Yantchev of Sofia BG

Bryant Garcia of Mississauga CA

Viktor Plesski of Gorgier CH

Soumya Yandrapalli of Amsterdam NL

Robert B. Hammond of Rockville MD US

Patrick Turner of Portola Valley CA US

Jesson John of Dublin CA US

SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC DEVICE

This abstract first appeared for US patent application 20250105816 titled 'SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC DEVICE

Original Abstract Submitted

resonator and filter devices and methods of fabrication. a resonator chip includes a substrate, a piezoelectric plate, and an acoustic bragg reflector between the substrate and a back surface of the piezoelectric plate. a conductor pattern on a surface of the piezoelectric plate includes a first plurality of contact pads and an interdigital transducer (idt). the acoustic bragg reflector is configured to reflect the shear primary acoustic mode. an interposer has a second plurality of contact pads on a back surface. a seal connects a perimeter of the piezoelectric plate to a perimeter of the interposer. each contact pad of the first plurality of contact pads is directly connected to a respective contact pad of the second plurality of contact pads.