ACOUSTIC WAVE DEVICE

Organization Name

murata manufacturing co., ltd.

Inventor(s)

Toru Yamaji of Nagaokakyo-shi (JP)

Sunao Yamazaki of Nagaokakyo-shi (JP)

Hiroya Suzuki of Nagaokakyo-shi (JP)

ACOUSTIC WAVE DEVICE

This abstract first appeared for US patent application 20250015779 titled 'ACOUSTIC WAVE DEVICE

Original Abstract Submitted

an acoustic wave device includes a support including a support substrate, a piezoelectric layer on the support in a first direction, a functional electrode on the piezoelectric layer, and a reinforcement film on the piezoelectric layer. the support includes a space portion that opens on a side of the piezoelectric layer, and an extended passage extending farther toward an outer side than an edge of the space portion in a second direction intersecting the first direction. a through-hole is provided at a position not overlapping the functional electrode in plan view in the first direction, communicates with the extended passage, and penetrates the piezoelectric layer. the reinforcement film is provided in a region between the through-hole and the space portion and overlaps at least a portion of a region where the piezoelectric layer and the extended passage overlap each other in the plan view.