TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR

Organization Name

murata manufacturing co., ltd.

Inventor(s)

Albert Cardona of Santa Barbara CA (US)

Andrew Kay of Provo UT (US)

Chris O'brien of San Diego CA (US)

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR

This abstract first appeared for US patent application 20250015774 titled 'TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR

Original Abstract Submitted

an acoustic resonator device is provided that includes a wafer having a wafer surface and a wafer conductor pattern on the wafer surface; a piezoelectric layer having front and back surfaces, a portion of the piezoelectric layer being over a cavity between the wafer and the piezoelectric layer, and the wafer conductor pattern; a device conductor pattern including a first metal layer including an interdigital transducer on the front surface of the piezoelectric layer and facing the wafer, and a second metal layer attached to a portion of the device conductor pattern to provide an electrical connection between the idt and the wafer conductor pattern. the second metal layer is bonded to the wafer conductor pattern and the piezoelectric layer comprises openings extending therethrough.