Micron technology, inc. (20240411090). METHOD OF FORMING PHOTONICS STRUCTURES

METHOD OF FORMING PHOTONICS STRUCTURES

Organization Name

micron technology, inc.

Inventor(s)

Gurtej Sandhu of Boise ID (US)

METHOD OF FORMING PHOTONICS STRUCTURES

This abstract first appeared for US patent application 20240411090 titled 'METHOD OF FORMING PHOTONICS STRUCTURES

Original Abstract Submitted

the disclosed embodiments relate to an integrated circuit structure and methods of forming them in which photonic devices are formed on the back end of fabricating a cmos semiconductor structure containing electronic devices. doped regions associated with the photonic devices are formed using microwave annealing for dopant activation.