SILICON-BASED 3-DIMENSIONAL MICROFLUIDICS

Organization Name

international business machines corporation

Inventor(s)

[[:Category:Emanuel Marc L�rtscher of Hedingen CH|Emanuel Marc L�rtscher of Hedingen CH]][[Category:Emanuel Marc L�rtscher of Hedingen CH]]

SILICON-BASED 3-DIMENSIONAL MICROFLUIDICS

This abstract first appeared for US patent application 20250144621 titled 'SILICON-BASED 3-DIMENSIONAL MICROFLUIDICS

Original Abstract Submitted

a microfluidic device is disclosed. the microfluidic device includes a silicon layer having a first channel formed in a first side of the silicon layer and a second channel formed in a second side of the silicon layer. the silicon layer has a vertical connection extending through the silicon layer. the microfluidic device further includes a bottom wafer bonded to the first side of the silicon layer to cover the first channel. the microfluidic device further includes a glass wafer bonded to the second side of the silicon layer to cover the second channel. the microfluidic device further includes an electronic component integrated into the silicon layer.