CORROSION RESISTANT SINGLE DAMASCENE INTERCONNECTS

Organization Name

international business machines corporation

Inventor(s)

Takeshi Nogami of Schenectady NY (US)

Daniel Charles Edelstein of White Plains NY (US)

Wei-Tsu Tseng of Hopewell Junction NY (US)

James J. Kelly of Schenectady NY (US)

Donald Francis Canaperi of Bridgewater CT (US)

CORROSION RESISTANT SINGLE DAMASCENE INTERCONNECTS

This abstract first appeared for US patent application 20240431025 titled 'CORROSION RESISTANT SINGLE DAMASCENE INTERCONNECTS

Original Abstract Submitted

a single-damascene interconnect comprises a first conductor line and a second conductor line. the single-damascene interconnect also comprises a via connecting the first conductor line and second conductor line. the via is filled with a low resistivity metal conductor. the low resistivity metal conductor has high corrosion resistance. the metal conductor is not the same material as the first or second conductor lines.