Honeywell international inc. (20240410915). ACCELEROMETER INCLUDING PROOF MASS
ACCELEROMETER INCLUDING PROOF MASS
Organization Name
Inventor(s)
Paul W. Dwyer of Seattle WA (US)
ACCELEROMETER INCLUDING PROOF MASS
This abstract first appeared for US patent application 20240410915 titled 'ACCELEROMETER INCLUDING PROOF MASS
Original Abstract Submitted
an example proof mass includes a substrate; one or more etched apertures in the substrate; and one or more integrated coils, wherein the one or more etched apertures are formed by selective laser etching, wherein the one or more integrated coils are formed by laser ablation.