Honeywell international inc. (20240410914). TRANSLATIONAL MASS ACCELEROMETER
TRANSLATIONAL MASS ACCELEROMETER
Organization Name
Inventor(s)
Paul W. Dwyer of Seattle WA (US)
Stephen F. Becka of Nampa ID (US)
TRANSLATIONAL MASS ACCELEROMETER
This abstract first appeared for US patent application 20240410914 titled 'TRANSLATIONAL MASS ACCELEROMETER
Original Abstract Submitted
an example micro electro-mechanical systems (mems) accelerometer device includes a proof mass comprising at least one of one or more isolated conductive coil traces or one or more pick-off combs within the proof mass, the one or more pick-off combs comprising a plurality of pick-off comb tines; a pole-piece layer coupled to the proof mass; and a return-path layer coupled to the proof mass, wherein the at least one of the one or more isolated conductive coil traces or the one or more pick-off combs are formed by selective laser etching.