GE Precision Healthcare LLC (20240252147). METHODS AND SYSTEMS FOR CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS
METHODS AND SYSTEMS FOR CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS
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METHODS AND SYSTEMS FOR CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS
This abstract first appeared for US patent application 20240252147 titled 'METHODS AND SYSTEMS FOR CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS
Original Abstract Submitted
various methods and systems are provided for a microelectromechanical systems (mems) device. in one example, the mems device may include a silicon wafer with a first oxide coating, a cavity in the first oxide coating having a substantially flat floor formed of a layer of the first oxide coating and etched to a first depth prior to deposition of a masking layer, and a membrane coupled to the silicon wafer and spaced away from the substantially flat floor of the cavity by a second depth of the cavity. the second depth is a sum of the first depth and a height of a second oxide coating formed at the post regions of the mems device after the masking layer is removed from the post regions.
