Fujifilm corporation (20250107449). PIEZOELECTRIC ELEMENT AND ACTUATOR
PIEZOELECTRIC ELEMENT AND ACTUATOR
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PIEZOELECTRIC ELEMENT AND ACTUATOR
This abstract first appeared for US patent application 20250107449 titled 'PIEZOELECTRIC ELEMENT AND ACTUATOR
Original Abstract Submitted
in a piezoelectric element and an actuator, the piezoelectric element includes a substrate; and a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode provided on the substrate in this order, in which the first piezoelectric film and the second piezoelectric film each have a perovskite-type oxide as a main component, and one of the first piezoelectric film and the second piezoelectric film is an epitaxial film and the other is a uniaxial alignment film.