Canon kabushiki kaisha (20250100208). MOLDING SYSTEM, MOLDING METHOD, AND ARTICLE MANUFACTURING METHOD
MOLDING SYSTEM, MOLDING METHOD, AND ARTICLE MANUFACTURING METHOD
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MOLDING SYSTEM, MOLDING METHOD, AND ARTICLE MANUFACTURING METHOD
This abstract first appeared for US patent application 20250100208 titled 'MOLDING SYSTEM, MOLDING METHOD, AND ARTICLE MANUFACTURING METHOD
Original Abstract Submitted
during a molding process for bringing a mold into contact with a substrate on which a foreign substance is inspected, thereby molding a composition on the substrate, foreign substance positions on the substrate are detected, a substrate foreign substance position where a foreign substance is present on the substrate before the molding process is started is identified among the detected foreign substance positions, and an inspection condition used to inspect a foreign substance on the substrate is updated based on the identified substrate foreign substance position. an inspection condition is thus updated, whereby it is possible to provide a configuration having an advantage in detecting a foreign substance on a substrate.