Applied materials, inc. (20250125170). RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE
RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE
Organization Name
Inventor(s)
Michael R. Rice of Pleasanton CA US
RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE
This abstract first appeared for US patent application 20250125170 titled 'RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE
Original Abstract Submitted
a mainframe of a device fabrication system comprises a base and a plurality of facets on the base, wherein a first facet of the plurality of facets comprises a first frame comprising a first column on a first side of the first facet, a second column on a second side of the first facet, and a beam connecting the first column to the second column. the mainframe further comprises a lid over the plurality of facets, wherein the base, the lid and the plurality of facets together define an interior volume. a first replaceable interface plate is sealed to the first frame of the first facet. the first column of the first facet comprises a first channel that fluidly couples a first vacuum region associated with the first replaceable interface plate to a vacuum port.