Applied materials, inc. (20250125123). SMART FACEPLATE USING SHAPE MEMORY ALLOY POPPET ACTUATORS
SMART FACEPLATE USING SHAPE MEMORY ALLOY POPPET ACTUATORS
Organization Name
Inventor(s)
Nitish Kumar Singh of Bangalore IN
SMART FACEPLATE USING SHAPE MEMORY ALLOY POPPET ACTUATORS
This abstract first appeared for US patent application 20250125123 titled 'SMART FACEPLATE USING SHAPE MEMORY ALLOY POPPET ACTUATORS
Original Abstract Submitted
embodiments of the present disclosure relate to a faceplate that implements poppets to vary nozzle cross-sections. in one embodiment, a faceplate is provided. the faceplate includes a body, a plurality of holes in the body, and a plurality of poppet assemblies. the poppet assemblies include a poppet configured to travel in a first portion of the hole and create a variable passage in a second portion of the hole. the poppet assemblies further include a first spring connected to the poppet and operable to move the poppet in a first direction when connected to an electrical power, and a second spring connected to the poppet and operable to move the poppet in a second direction that is opposite the first direction when the electrical power is reduced or terminated.