POLISHING ARTICLES FOR HYBRID BONDING APPLICATIONS

printable resin precursor compositions and polishing articles including printable resin precursors are provided that are particularly suited for polishing substrates utilized in hybrid bonding applications. methods and articles may include a plurality of first polishing elements, where at least one of the plurality of first polymer layers forms the polishing surface; and one or more second polishing elements, where at least a region of each of the one or more second polishing elements is disposed between at least one of the plurality of first polishing elements and a supporting surface of the polishing pad. one or more first polishing elements have a shore d hardness of greater than 60, one or more second polishing elements have a shore d hardness of from about 20 to less than 60, and the polishing article has a total shore d hardness of greater than or about 50.