Applied materials, inc. (20250114908). HIGH PERFORMANCE CMP MULTIDISK APPARATUS
HIGH PERFORMANCE CMP MULTIDISK APPARATUS
Organization Name
Inventor(s)
Nai-Chieh Huang of Mountain View CA US
Akshay Aravindan of Sunnyvale CA US
Shih-Haur Shen of Sunnyvale CA US
Jianshe Tang of San Jose CA US
Jay Gurusamy of Santa Clara CA US
Chen-Wei Chang of San Jose CA US
Chih-Han Yang of Emeryville CA US
HIGH PERFORMANCE CMP MULTIDISK APPARATUS
This abstract first appeared for US patent application 20250114908 titled 'HIGH PERFORMANCE CMP MULTIDISK APPARATUS
Original Abstract Submitted
a system may include a gimbal defining a plurality of pockets, where each pocket may include a first portion and a second portion that extends between the first portion and a base of the pocket. the second portion may have a greater diameter than the first portion. the system may include a plurality of conditioning disks, where each conditioning disk is seated within the first portion of a respective pocket. the system may include a plurality of gaskets, where each gasket is seated within the second portion of a respective pocket. the system may include a plurality o-rings, each o-ring disposed between a peripheral edge of one of the plurality of conditioning disks and a lateral wall of one of the plurality of pockets. the system may include a plurality of shoulder screws for coupling the gimbal with one of the plurality of gaskets and a conditioning disk.
- Applied materials, inc.
- Nai-Chieh Huang of Mountain View CA US
- Akshay Aravindan of Sunnyvale CA US
- Shih-Haur Shen of Sunnyvale CA US
- Jianshe Tang of San Jose CA US
- Jay Gurusamy of Santa Clara CA US
- Chen-Wei Chang of San Jose CA US
- Chih-Han Yang of Emeryville CA US
- Wei Lu of Fremont CA US
- B24B53/017
- CPC B24B53/017