Applied materials, inc. (20250114806). SMART FACEPLATE/SHOWERHEAD USING SHAPE MEMORY ALLOY

SMART FACEPLATE/SHOWERHEAD USING SHAPE MEMORY ALLOY

Organization Name

applied materials, inc.

Inventor(s)

Barath Kumar of Puducherry IN

Sumesh Suresh of Bangalore IN

SMART FACEPLATE/SHOWERHEAD USING SHAPE MEMORY ALLOY

This abstract first appeared for US patent application 20250114806 titled 'SMART FACEPLATE/SHOWERHEAD USING SHAPE MEMORY ALLOY

Original Abstract Submitted

exemplary substrate processing system faceplates may include a plate that is characterized by a first surface and a second surface opposite the first surface. the second surface may define a plurality of recesses that extend through a portion of a thickness of the plate. the plate may define a plurality of apertures through the thickness of the plate. each aperture may extend through a bottom surface of one recess of the plurality of recesses. each recess may have a greater diameter than the aperture extending through the bottom surface of the recess. the faceplate may include a plurality of shape-memory actuators. each shape-memory actuator may be seated within a respective one of the plurality of recesses. each shape-memory actuator may define an actuator aperture. a diameter of the actuator aperture each shape memory actuator may be variable.