Applied materials, inc. (20250108479). POLISHING HEAD WITH FLEXURE EXTENDING THROUGH PRESSURE CHAMBER
POLISHING HEAD WITH FLEXURE EXTENDING THROUGH PRESSURE CHAMBER
Organization Name
Inventor(s)
Andrew J. Nagengast of Sunnyvale CA US
Jeonghoon Oh of Saratoga CA US
Kuen-Hsiang Chen of Sunnyvale CA US
Steven M. Zuniga of Soquel CA US
Takashi Fujikawa of San Jose CA US
Jay Gurusamy of Santa Clara CA US
Ekaterina A. Mikhaylichenko of San Jose CA US
Eric L. Lau of Santa Clara CA US
Huanbo Zhang of San Jose CA US
Welarumage Ravin Fernando of Santa Clara CA US
POLISHING HEAD WITH FLEXURE EXTENDING THROUGH PRESSURE CHAMBER
This abstract first appeared for US patent application 20250108479 titled 'POLISHING HEAD WITH FLEXURE EXTENDING THROUGH PRESSURE CHAMBER
Original Abstract Submitted
a carrier head for chemical mechanical polishing includes a housing for attachment to a drive shaft, a membrane assembly arranged beneath the lower carrier body, and a flexure. the membrane assembly includes a membrane support and a flexible membrane secured to the membrane support to defining a plurality of pressurizable lower chambers, with the flexible membrane having a lower surface that provides a substrate mounting surface. a flexible seal forms a pressurizable upper chamber between the housing and the membrane support. the flexure connects the membrane support to the housing, and the flexure extends through the pressurizable upper chamber.
- Applied materials, inc.
- Andrew J. Nagengast of Sunnyvale CA US
- Jeonghoon Oh of Saratoga CA US
- Kuen-Hsiang Chen of Sunnyvale CA US
- Steven M. Zuniga of Soquel CA US
- Takashi Fujikawa of San Jose CA US
- Jay Gurusamy of Santa Clara CA US
- Ekaterina A. Mikhaylichenko of San Jose CA US
- Eric L. Lau of Santa Clara CA US
- Huanbo Zhang of San Jose CA US
- Welarumage Ravin Fernando of Santa Clara CA US
- B24B37/32
- CPC B24B37/32