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Applied materials, inc. (20250102074). PROPORTIONAL FLUID FLOW VALVE AND METHODS OF OPERATING THEREOF

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PROPORTIONAL FLUID FLOW VALVE AND METHODS OF OPERATING THEREOF

Organization Name

applied materials, inc.

Inventor(s)

Srikanth Krishnamurthy of Bangalore IN

PROPORTIONAL FLUID FLOW VALVE AND METHODS OF OPERATING THEREOF

This abstract first appeared for US patent application 20250102074 titled 'PROPORTIONAL FLUID FLOW VALVE AND METHODS OF OPERATING THEREOF

Original Abstract Submitted

certain embodiments of the present disclosure relate to a fluid flow valve. the valve includes a housing configured to receive a flow of fluid. the valve further includes a diaphragm to actuate between a closed position and a plurality of open positions. the valve further includes a first valve portion configured to flow a first amount of fluid responsive to the diaphragm actuating to one or more first open positions of the plurality of open positions. the valve further includes a second valve portion in parallel with the first valve portion and configured to flow a second amount of fluid responsive to the diaphragm actuating to one or more second open positions of the plurality of open positions.

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