Applied materials, inc. (20250092953). HIGH CONDUCTANCE VARIABLE ORIFICE VALVE
HIGH CONDUCTANCE VARIABLE ORIFICE VALVE
Organization Name
Inventor(s)
Muhannad Mustafa of Milpitas CA US
Sanjeev Baluja of Campbell CA US
HIGH CONDUCTANCE VARIABLE ORIFICE VALVE
This abstract first appeared for US patent application 20250092953 titled 'HIGH CONDUCTANCE VARIABLE ORIFICE VALVE
Original Abstract Submitted
variable orifice valves comprising a first fixed plate, a second fixed plate and a movable plate between are described. the movable plate is connected to the first fixed plate and the second fixed plate by sealing elements. the movable plate is moved closer to or further from the first fixed plate by rotation of an actuator ring that rotates at least two rotary elements connected to the movable plate. a needle on the movable plate engages an opening in the valve to seal or open the valve to allow fluid flow. methods of controlling flow of fluid through the variable orifice valve are also described.